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氢硅

氢硅

氢硅

2

The invention relates to a method for preparing trichlorosilane from tetrachlorosilane, belonging to the field of polysilicon production .

本发明涉及一种由四氯化硅制取三氯氢硅的方法，属于多晶硅生产领域。

4

Trichloro hydrogen silicon flammable explosive , and has the toxicity .

三氯氢硅易燃易爆，且具有毒性。

5

Also more and more falls short of demand as the preparation polycrystalline silicon 's important raw material - - trichloro hydrogen silicon .

作为制备多晶硅的重要原料 ——三氯氢硅也越来越供不应求。

6

Influences of hydrogen chlorine containing water on the production of trichlorosilane

氯化氢含水对生产三氯氢硅的影响

7

Process summarization and developing trend of trichlorosilane

三氯氢硅工艺概况及发展趋势

8

Layout and Lifting Scheme of Main Equipment of Trichlorosilane

三氯氢硅装置主要设备布置及吊装方案

9

Harness of tail gas of trichlorosilane synthesis furnace

三氯氢硅合成炉尾气的治理

10

TEM Observation of Microdefects in Hydrogen-Implanted Silicon Wafers

注氢硅中微结构缺陷的 TEM 观察

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